GaN/AlGaN异质界面上二维空穴气体的表征

Pucheng Liu, K. Kakushima, H. Iwai, A. Nakajima, T. Makino, M. Ogura, S. Nishizawa, H. Ohashi
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引用次数: 2

摘要

研究了GaN/Al0.23Ga0.77N异质界面上二维空穴气体(2DHG)的电学性质。通过电容电压和霍尔效应测量,证实了界面处存在2DHG。通过x射线衍射、透射电子显微镜、原子力显微镜、二次离子质谱和温度相关霍尔效应的实验评价,探讨了2DHG与常规Mg杂质产生空穴的输运机理。
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Characterization of two-dimensional hole gas at GaN/AlGaN heterointerface
Electrical properties of two-dimensional hole gas (2DHG) at GaN/Al0.23Ga0.77N heterointerface have been investigated. Existence of 2DHG at the interface is confirmed by capacitance-voltage and Hall Effect measurement. We have discussed transport mechanism of 2DHG by comparison with hole generated by conventional Mg impurity, based on experimental evaluations by X-ray diffraction, transmission electron microscope, atomic force microscope, secondary ion mass spectroscopy, and temperature dependence Hall Effect measurements.
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