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600 V GaN HEMT on 6-inch Si substrate using Au-free Si-LSI process for power applications 在6英寸Si衬底上使用无au Si- lsi工艺的600 V GaN HEMT用于电源应用
Pub Date : 2013-10-01 DOI: 10.1109/WIPDA.2013.6695552
T. Kikkawa, T. Hosoda, S. Akiyama, Y. Kotani, Toshihiro Wakabayashi, Tsutomu Ogino, K. Imanishi, Akitoshi Mochizuki, K. Itabashi, K. Shono, Y. Asai, K. Joshin, T. Ohki, M. Kanamura, M. Nishimori, T. Imada, J. Kotani, A. Yamada, N. Nakamura, T. Hirose, Keiji Watanabe
In this paper, we describe 600 V GaN high electron mobility transistors (HEMTs) technologies on a 6-inch Si substrate using an Au-free Si-LSI mass production line. Metal insulator semiconductor (MIS) HEMTs were fabricated using AlN as a gate insulator. The AlN layer was deposited by thermal atomic layer deposition (ALD) method using the mass-production-type vertical reactor which was capable for over 100 wafer depositions per run. High-temperature breakdown voltage of over 600 V was confirmed. Uniform static on-resistance (RON) across a 6-inch wafer was demonstrated using the AlN based gate insulator. Stable dynamic RON characteristics till 600 V were also verified using packaged GaN HEMT devices, suggesting that GaN on Si technology in this study is ready for manufacturing. Power factor control (PFC) circuit board operation was also demonstrated at high frequency up to 1 MHz.
在本文中,我们描述了600 V GaN高电子迁移率晶体管(hemt)技术在6英寸Si衬底上使用无金Si- lsi量产线。采用AlN作为栅极绝缘体制备了金属绝缘体半导体hemt。采用热原子层沉积法(ALD)沉积AlN层,采用可批量生产的立式反应器,每运行可沉积100片以上。高温击穿电压超过600 V。使用AlN基栅绝缘体演示了6英寸晶圆上均匀的静态导通电阻(RON)。使用封装的GaN HEMT器件也验证了600 V前的稳定动态RON特性,这表明本研究中的GaN on Si技术已经准备好用于制造。功率因数控制(PFC)电路板操作也演示了在高达1兆赫的高频。
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引用次数: 5
Characterization of two-dimensional hole gas at GaN/AlGaN heterointerface GaN/AlGaN异质界面上二维空穴气体的表征
Pub Date : 2013-10-01 DOI: 10.1109/WIPDA.2013.6695585
Pucheng Liu, K. Kakushima, H. Iwai, A. Nakajima, T. Makino, M. Ogura, S. Nishizawa, H. Ohashi
Electrical properties of two-dimensional hole gas (2DHG) at GaN/Al0.23Ga0.77N heterointerface have been investigated. Existence of 2DHG at the interface is confirmed by capacitance-voltage and Hall Effect measurement. We have discussed transport mechanism of 2DHG by comparison with hole generated by conventional Mg impurity, based on experimental evaluations by X-ray diffraction, transmission electron microscope, atomic force microscope, secondary ion mass spectroscopy, and temperature dependence Hall Effect measurements.
研究了GaN/Al0.23Ga0.77N异质界面上二维空穴气体(2DHG)的电学性质。通过电容电压和霍尔效应测量,证实了界面处存在2DHG。通过x射线衍射、透射电子显微镜、原子力显微镜、二次离子质谱和温度相关霍尔效应的实验评价,探讨了2DHG与常规Mg杂质产生空穴的输运机理。
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引用次数: 2
5-phase interleaved buck converter with gallium nitride transistors 氮化镓晶体管的5相交错降压变换器
Pub Date : 2013-10-01 DOI: 10.1109/WIPDA.2013.6695594
N. Videau, T. Meynard, V. Bley, D. Flumian, E. Sarraute, G. Fontès, J. Brandelero
More compact power converters can be realized with the recently introduced gallium nitride (GaN) power devices. However, power board layout becomes more critical. In order to reduce switching losses, voltage overshoot and to achieve fast and safe drive, the stray inductances should be minimized. In this paper, a 5-phase DC-DC interleaved buck converter with an InterCell Transformer (ICT) integrated in a multilayer PCB using GaN EPC 100V devices is described. It appears that the routing of power decoupling capacitors is the result of a tradeoff between stray inductance and cooling with a single heatsink for the 5 phases. The power board (110mm×62mm, 51g) reaches 97% efficiency with a 48V to 24V conversion at 1.8kW and an effective output current frequency of 1.5MHz.
最近推出的氮化镓(GaN)功率器件可以实现更紧凑的功率变换器。然而,电源板布局变得更加关键。为了减少开关损耗和电压超调,实现快速、安全的驱动,杂散电感必须最小化。本文介绍了一种采用GaN EPC 100V器件集成在多层PCB板上的5相DC-DC交错降压变换器和InterCell变压器(ICT)。看来,功率去耦电容器的布线是杂散电感和5相单个散热片冷却之间权衡的结果。电源板(110mm×62mm, 51g)在1.8kW下48V到24V转换,有效输出电流频率为1.5MHz,效率达到97%。
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引用次数: 15
GaN HEMT reliability at 125 °C for 1000 hours GaN HEMT在125℃下工作1000小时的可靠性
Pub Date : 2013-10-01 DOI: 10.1109/WIPDA.2013.6695590
J. Moses, Luke L. Jenkins, Jeffrey M. Aggas, William E. Abell, S. Henning, John Tennant, C. Wilson, R. Dean
With the growing popularity of GaN HEMTs, the reliability of the transistors after prolonged exposure and use at high temperatures is of increasing importance. Previous work has shown that GaN FETs can operate at temperatures higher greater than 500°C for short amounts of time, but need to be tested at rated operating temperatures. In order to determine whether commercial GaN HEMTs can be reliable at a more typical operating temperature, three EPC parts were tested. The EPC2001, EPC2014, and EPC2015 parts were characterized before temperature testing with a curve tracer. The parts were tested at and above their rated voltage for 1000 hours at a constant 125°C. After the 1000 hours of testing, each EPC part was characterized again on the curve tracer. No failures were observed during the 1000 hours of testing, but during the posttest characterization the RDS(ON) of all the parts increased, parts failed at their rated maximum of 6 V to the gate, and some of the EPC2014s failed at all voltages.
随着GaN hemt的日益普及,晶体管在长时间暴露和高温下使用后的可靠性变得越来越重要。先前的工作表明,GaN场效应管可以在高于500°C的温度下工作很短的时间,但需要在额定工作温度下进行测试。为了确定商用GaN hemt在更典型的工作温度下是否可靠,对三个EPC部件进行了测试。在温度测试前,对EPC2001、EPC2014和EPC2015零件进行了表征。在恒定125°C下,在额定电压及额定电压以上测试1000小时。经过1000小时的测试,每个EPC零件在曲线示踪仪上再次进行表征。在1000小时的测试中没有观察到任何故障,但在测试后表征期间,所有部件的RDS(ON)都增加了,部件在额定最大电压为6 V时失效,并且一些epc2014在所有电压下都失效。
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引用次数: 5
Modelling of temperature dependence on current collapse phenomenon in AlGaN/GaN HEMT devices AlGaN/GaN HEMT器件中电流坍塌现象对温度依赖性的建模
Pub Date : 2013-10-01 DOI: 10.1109/WIPDA.2013.6695581
G. Samudra, Yung C. Liang, Yuling Li, Y. Yeo
This paper reports the studies of the temperature dependence on the current collapse behaviours of AlGaN/GaN high electron mobility transistors (HEMTs). A physical-based model is proposed to analyse the trapping and de-trapping process along the surface with the effect of temperature included for the first time. The temperature-dependent gate leakage current is treated as the source for electron trapping and it can be predicted by the proposed model quantitatively. Then the relationship of the capture cross section of the surface trap on the electric field is investigated with respect to temperature variations. By applying the Poole-Frenkel emission mechanism, the dynamics of the trapped electrons at different temperatures are described in this model. The analytical results on current recovery time-constant are then verified by comparing with the laboratory measurement as well as the numerical results obtained from Sentaurus TCAD simulations.
本文报道了温度对AlGaN/GaN高电子迁移率晶体管(HEMTs)电流坍缩行为的影响。提出了一个基于物理的模型来分析沿表面的捕获和释放过程,并首次考虑了温度的影响。将与温度相关的栅极泄漏电流作为电子捕获源,并利用所提出的模型对其进行定量预测。然后研究了表面捕集器捕获截面随电场温度变化的关系。利用普尔-弗伦克尔发射机制,描述了捕获电子在不同温度下的动力学。通过与实验室测量结果和Sentaurus TCAD模拟结果的比较,验证了电流恢复时间常数的分析结果。
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引用次数: 1
Bipolar III-N high-power electronic devices 双极III-N大功率电子器件
Pub Date : 2013-10-01 DOI: 10.1109/WIPDA.2013.6695571
R. Dupuis, Jeomoh Kim, T. Kao, Yi-Che Lee, Z. Lochner, M. Ji, J. Ryou, Theeradetch Detchphrom, S. Shen
We report high performance GaN-based npn heterojunction bipolar transistors (HBTs) grown by metalorganic chemical vapor deposition (MOCVD) with state-of-the-art high collector current density (JC) and low knee voltage (Vknee). For HBTs grown on sapphire, the common-emitter I-V characteristics show high JC > 16 kA/cm2 with an offset voltage (Voffset) of <; 0.25V, Vknee <; 2.4 V and BVCEO = 105 V. High-temperature performance is also evaluated for InGaN HBTs grown on a free-standing GaN substrate. The device shows the peak current gain reduces from 93 at 25 C to 35 at 250C. Higher free hole concentration in the p-InGaN base is observed at elevated temperature that helps reduce the base resistance and Vknee in high-temperature InGaN HBTs operation.
本文报道了采用金属有机化学气相沉积(MOCVD)技术制备的高性能氮化镓基npn异质结双极晶体管(HBTs),该晶体管具有最先进的高集电极电流密度(JC)和低膝电压(Vknee)。对于生长在蓝宝石上的HBTs,共发射极I-V特性显示出高JC > 16 kA/cm2,偏置电压(Voffset) <;0.25V, Vknee <;2.4 V, BVCEO = 105 V。在独立GaN衬底上生长的InGaN HBTs的高温性能也进行了评估。器件显示峰值电流增益从25℃时的93降低到250℃时的35。在高温下观察到p-InGaN基极中较高的自由空穴浓度,这有助于降低高温InGaN HBTs操作中的基极电阻和Vknee。
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引用次数: 2
Degradation of dynamic ON-resistance of AlGaN/GaN HEMTs under proton irradiation 质子辐照下AlGaN/GaN HEMTs动态on抗性降解
Pub Date : 2013-10-01 DOI: 10.1109/WIPDA.2013.6695575
A. Koehler, T. Anderson, B. Weaver, M. Tadjer, K. Hobart, F. Kub
SiNx-passivated AlGaN/GaN high electron mobility transistors (HEMTs) on Si substrates demonstrated high tolerance to 2 MeV proton irradiation, up to a dose of 6 × 1014 cm-2. Radiation-induced changes were observed in Hall mobility, two-dimensional electron gas sheet carrier density, sheet resistance, ON-resistance, transconductance, threshold voltage, and dynamic ON-resistance. Dynamic ON-resistance was measured by pulsing to ON-state from OFF-state quiescent points with drain voltages up to 20 V. The dynamic ON-resistance measured from high OFF-state quiescent voltages was more sensitive to irradiation than the DC and Hall parameters, making the dynamic ON-resistance measurement useful in characterizing radiation-induced degradation.
Si衬底上sinx钝化的AlGaN/GaN高电子迁移率晶体管(HEMTs)对2 MeV质子照射具有很高的耐受性,照射剂量可达6 × 1014 cm-2。辐射引起的变化包括霍尔迁移率、二维电子气片载流子密度、片电阻、导通电阻、跨导、阈值电压和动态导通电阻。动态导通电阻的测量方法是在漏极电压高达20 V的情况下,从关断状态的静态点脉冲到导通状态。在高关断静态电压下测量的动态导通电阻比直流和霍尔参数对辐照更敏感,这使得动态导通电阻测量对表征辐射诱导降解非常有用。
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引用次数: 15
The impact of inductor selection on a 12-1 V GaN POL converter with over 94% peak efficiency and higher load optimization 电感选择对峰值效率超过94%和更高负载优化的12-1 V GaN POL变换器的影响
Pub Date : 2013-10-01 DOI: 10.1109/WIPDA.2013.6695555
Benjamin K. Rhea, C. Wilson, Luke L. Jenkins, R. Dean
The overall power system can generally be divided into three stages: front end, middle stage and point-of-load (POL). The overall efficiency of the power supply chain is dependent on the multiplicity effect which means each stage should be taken into account. Increases in efficiency of the POL converter have the benefit of reducing extra heat generation near the load, reducing overall power dissipation, and reducing the cooling requirement. A 12-1 V buck converter with 94% peak efficiency is presented that takes into account the many factors contributing to the losses in efficiency such as switching losses and conductance losses. All of these factors should be considered for an optimal design that maximizes efficiency. The switching losses have been reduced leaving the inductor as the dominant source of loss. Therefore, the choice of the inductor is dependent on whether the design is for peak efficiency at light loads or optimization of efficiency at higher loads.
整个电力系统一般可分为三个阶段:前端阶段、中期阶段和负载点阶段。电力供应链的整体效率取决于多重效应,这意味着每个阶段都需要考虑。POL转换器效率的提高有利于减少负载附近的额外热量产生,降低总体功耗,并降低冷却要求。提出了一种峰值效率为94%的12-1 V降压变换器,该变换器考虑了导致效率损失的多种因素,如开关损耗和电导损耗。为了实现效率最大化的最佳设计,应该考虑所有这些因素。开关损耗已经降低,使电感成为损耗的主要来源。因此,电感的选择取决于设计是针对轻负载时的峰值效率,还是针对高负载时的效率优化。
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引用次数: 7
High-temperature gate drive circuit for silicon-carbide JFETs 碳化硅jfet的高温栅驱动电路
Pub Date : 2013-10-01 DOI: 10.1109/WIPDA.2013.6695565
Matthew Jones, B. Ratliff, Ya-Chi Chen, C. Neft, A. Bhunia
An electrical and thermal optimization study is conducted for a high-temperature gate drive circuit, developed to drive custom-designed, 50 A, 600 V silicon-carbide (SiC) power modules consisting of multiple normally-off JFET dice (SemiSouth SJEC120R100) in parallel and rated at 175 °C device junction temperature. The gate drive and power modules are intended for use in a bi-directional DC-DC converter. The gate drive circuit is designed for operation in an enclosure in 120°C ambient air. Primary cooling of the gate drive is through the back of the circuit board to an aluminum plate, the base of which is cooled with engine coolant (water-ethylene glycol mixture) at an inlet temperature of 100°C. The power module consists of a single pole, with the close-coupled gate drive circuit providing independent and isolated drive for the two switches. The gate drive circuit is capable of operating the switches at PWM carrier frequencies up to 50 kHz, with duty cycles ranging from 0 to 98%.
对高温栅极驱动电路进行了电气和热优化研究,该电路用于驱动定制设计的50 a, 600 V碳化硅(SiC)功率模块,该模块由多个常关JFET器件(semissouth SJEC120R100)并联组成,额定器件结温为175°C。栅极驱动和电源模块用于双向DC-DC转换器。栅极驱动电路设计用于在120°C环境空气的外壳中运行。栅极驱动的一次冷却是通过电路板的背面到铝板上,铝板的底部用发动机冷却剂(水-乙二醇混合物)冷却,入口温度为100°C。电源模块由单极组成,紧耦合栅极驱动电路为两个开关提供独立和隔离的驱动。门驱动电路能够以高达50 kHz的PWM载波频率操作开关,占空比范围从0到98%。
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引用次数: 3
Analyzing losses using junction temperature of 300V 2.4kW 96% efficient, 1MHz GaN synchronous boost converter 利用300V 2.4kW 96%效率,1MHz GaN同步升压变换器结温分析损耗
Pub Date : 2013-10-01 DOI: 10.1109/WIPDA.2013.6695579
B. Hughes, J. Lazar, S. Hulsey, A. Garrido, D. Zehnder, Marcel Musni, R. Chu, K. Boutros
New techniques for measuring and analyzing losses in GaN power converters are presented. A 2.4kW synchronous boost converter, switching 300V at 1MHz with normally-off, AlN-base gate, AlGaN/GaN HFETs [1], serves as a vehicle to substantiate the results. An infrared camera is utilized to accurately measure temperatures of the upper and lower switches, as a function of switched current. These temperature measurements are correlated to loss in the respective switches, utilizing temperature data obtained via DC loss measurements. The higher temperature observed in the lower switch results from the switching loss in that switch, and is clearly evident in the thermal images. Analysis of the temperature dependence exposes the loss due to dynamic on-resistance and the switching loss. The extracted parameters accurately model both the efficiency and junction temperatures versus switching current.
介绍了氮化镓功率变换器中损耗测量和分析的新技术。一个2.4kW同步升压变换器,在1MHz正常关断下切换300V, aln基栅,AlGaN/GaN hfet[1],作为验证结果的载体。红外摄像机被用来精确测量上下开关的温度,作为开关电流的函数。这些温度测量与各自开关的损耗相关,利用通过直流损耗测量获得的温度数据。在较低的开关中观察到的较高温度是由于该开关的开关损耗造成的,并且在热图像中非常明显。对温度依赖性的分析揭示了由动态导通电阻和开关损耗引起的损耗。提取的参数准确地模拟了效率和结温随开关电流的变化。
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引用次数: 7
期刊
The 1st IEEE Workshop on Wide Bandgap Power Devices and Applications
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