用微处理器控制器件定时的电压对比扫描电镜观察

18th International Reliability Physics Symposium Pub Date : 1980-04-01 DOI:10.1109/IRPS.1980.362912

J. Bindell, J. McGinn

{"title":"用微处理器控制器件定时的电压对比扫描电镜观察","authors":"J. Bindell, J. McGinn","doi":"10.1109/IRPS.1980.362912","DOIUrl":null,"url":null,"abstract":"A voltage contrast technique which generates a video display of data movement within an active integrated circuit has been developed. The technique utilizes a microprocessor to exercise and control the flow of data within an integrated circuit so that SEM images of sequential logic states can be generated without the use of electron beam blanking.","PeriodicalId":270567,"journal":{"name":"18th International Reliability Physics Symposium","volume":"458 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1980-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Voltage Contrast SEM Observations with Microprocessor Controlled Device Timing\",\"authors\":\"J. Bindell, J. McGinn\",\"doi\":\"10.1109/IRPS.1980.362912\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A voltage contrast technique which generates a video display of data movement within an active integrated circuit has been developed. The technique utilizes a microprocessor to exercise and control the flow of data within an integrated circuit so that SEM images of sequential logic states can be generated without the use of electron beam blanking.\",\"PeriodicalId\":270567,\"journal\":{\"name\":\"18th International Reliability Physics Symposium\",\"volume\":\"458 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1980-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"18th International Reliability Physics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IRPS.1980.362912\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"18th International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.1980.362912","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

提出了一种电压对比技术，可在有源集成电路中产生数据移动的视频显示。该技术利用微处理器来执行和控制集成电路中的数据流，从而可以在不使用电子束消隐的情况下生成顺序逻辑状态的扫描电镜图像。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Voltage Contrast SEM Observations with Microprocessor Controlled Device Timing

A voltage contrast technique which generates a video display of data movement within an active integrated circuit has been developed. The technique utilizes a microprocessor to exercise and control the flow of data within an integrated circuit so that SEM images of sequential logic states can be generated without the use of electron beam blanking.

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18th International Reliability Physics Symposium

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