在执行SPC时调整过程:一种基于实验顺序设计的方法

IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop Pub Date : 1990-09-11 DOI:10.1109/ASMC.1990.111236

E. Sachs, Á. Ingólfsson, S. Ha

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引用次数: 8

摘要

讨论了一种称为广义SPC的过程控制方法，它允许在过程被调优时对过程进行诊断。讨论了一种基于实验顺序设计的自适应控制模块逐行控制器。统计过程控制与逐行控制相比较。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Tuning a process while performing SPC: an approach based on the sequential design of experiments

An approach to process control called generalized SPC which allows for the diagnosis of a process while the process is being tuned is discussed. A control module, the run by run controller, that implements a form of adaptive control based on the sequential design of experiments is discussed. Statistical process control is compared to the run by run controller.<>

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IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop

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