双极晶体管和MOS结构中的应力和恢复瞬态

F. Ingvarson, L. Ragnarsson, P. Lundgren, K. Jeppson
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引用次数: 1

摘要

将双极晶体管在应力过程中的退化和随后的恢复与超薄氧化物MOS结构进行了比较。对双极晶体管和MOS结构进行了热处理,发现两种器件都表现出对数恢复瞬态,具有相似的温度依赖性,表明应力缺陷是相关的。本文还提出了一种新的双极晶体管加速表征技术。研究发现,这种新技术与开路集电极的常见反偏置应力诱导的退化类型相同,使其成为双极晶体管退化评估的有吸引力的工具,同时保持较短的应力时间。
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Stress and recovery transients in bipolar transistors and MOS structures
Bipolar transistor degradation during stress and the subsequent recovery was compared to that of ultra-thin oxide MOS structures. Heat treatment was used for recovery of both the bipolar transistors and the MOS structures, and it was found that both types of device show logarithmic recovery transients with similar temperature dependence, suggesting that the stress induced defects are related. A new accelerated characterization technique for bipolar transistors is also presented and included in the investigation. This new technique was found to induce the same type of degradation as the common reverse-bias stress with open collector, making it an attractive tool for bipolar transistor degradation assessment while maintaining a short stress time.
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