{"title":"产量提高","authors":"D. Wilcox, Slava Libman","doi":"10.1109/smtw.2004.1393719","DOIUrl":null,"url":null,"abstract":"The Yield Enhancement focus area is dedicated to activity ensuring that semiconductor manufacturing set up is optimized towards identifying, reducing, and avoiding yield-relevant defects and contamination.","PeriodicalId":160542,"journal":{"name":"2021 IEEE International Roadmap for Devices and Systems Outbriefs","volume":"45 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"Yield Enhancement\",\"authors\":\"D. Wilcox, Slava Libman\",\"doi\":\"10.1109/smtw.2004.1393719\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The Yield Enhancement focus area is dedicated to activity ensuring that semiconductor manufacturing set up is optimized towards identifying, reducing, and avoiding yield-relevant defects and contamination.\",\"PeriodicalId\":160542,\"journal\":{\"name\":\"2021 IEEE International Roadmap for Devices and Systems Outbriefs\",\"volume\":\"45 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 IEEE International Roadmap for Devices and Systems Outbriefs\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/smtw.2004.1393719\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE International Roadmap for Devices and Systems Outbriefs","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/smtw.2004.1393719","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The Yield Enhancement focus area is dedicated to activity ensuring that semiconductor manufacturing set up is optimized towards identifying, reducing, and avoiding yield-relevant defects and contamination.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
