{"title":"一个自动监控管理系统，有效的300毫米晶圆厂操作","authors":"Chung-Shen Wu, Da-Yin Liao","doi":"10.1109/ISSM.2001.962924","DOIUrl":null,"url":null,"abstract":"This paper presents an effective monitor operations automation system (MOAS) which is being developed for automatic monitor management in a 300 mm mass production fab in tsmc. Continuing the previous study of on 300 mm monitor automation, it is implemented by integrating with advanced 300 mm CIM systems as well as functions. MOAS demonstrates its capability as a key driver to realize the automation of complex fab monitor operations.","PeriodicalId":356225,"journal":{"name":"2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"An automatic monitor management system for effective 300 mm fab operations\",\"authors\":\"Chung-Shen Wu, Da-Yin Liao\",\"doi\":\"10.1109/ISSM.2001.962924\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents an effective monitor operations automation system (MOAS) which is being developed for automatic monitor management in a 300 mm mass production fab in tsmc. Continuing the previous study of on 300 mm monitor automation, it is implemented by integrating with advanced 300 mm CIM systems as well as functions. MOAS demonstrates its capability as a key driver to realize the automation of complex fab monitor operations.\",\"PeriodicalId\":356225,\"journal\":{\"name\":\"2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203)\",\"volume\":\"49 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-10-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISSM.2001.962924\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.2001.962924","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
An automatic monitor management system for effective 300 mm fab operations
This paper presents an effective monitor operations automation system (MOAS) which is being developed for automatic monitor management in a 300 mm mass production fab in tsmc. Continuing the previous study of on 300 mm monitor automation, it is implemented by integrating with advanced 300 mm CIM systems as well as functions. MOAS demonstrates its capability as a key driver to realize the automation of complex fab monitor operations.
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