{"title":"基于摆动电机原理的旋转射频MEMS开关","authors":"S. Pranonsatit, G. Hong, A. Holmes, S. Lucyszyn","doi":"10.1109/MEMSYS.2006.1627942","DOIUrl":null,"url":null,"abstract":"A novel, truly rotary, single-pole eight-throw (SP8T) RF MEMS switch is reported. The concept is an adaptation of the axial-gap electrostatic wobble motor. Details of the switch design and fabrication process are presented, together with initial test results for prototype devices. DC contact resistance measurements have been made over half a million rotations, yielding an average contact resistance of 2.5 Ω. The switch shows promising RF performance, with insertion loss varying smoothly from 0.6 dB at 2 GHz to 4 dB at 20 GHz, and isolation better than 31 dB across the frequency range 0.5 to 20 GHz.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"35 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":"{\"title\":\"Rotary RF MEMS Switch Based on the Wobble Motor Principle\",\"authors\":\"S. Pranonsatit, G. Hong, A. Holmes, S. Lucyszyn\",\"doi\":\"10.1109/MEMSYS.2006.1627942\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A novel, truly rotary, single-pole eight-throw (SP8T) RF MEMS switch is reported. The concept is an adaptation of the axial-gap electrostatic wobble motor. Details of the switch design and fabrication process are presented, together with initial test results for prototype devices. DC contact resistance measurements have been made over half a million rotations, yielding an average contact resistance of 2.5 Ω. The switch shows promising RF performance, with insertion loss varying smoothly from 0.6 dB at 2 GHz to 4 dB at 20 GHz, and isolation better than 31 dB across the frequency range 0.5 to 20 GHz.\",\"PeriodicalId\":250831,\"journal\":{\"name\":\"19th IEEE International Conference on Micro Electro Mechanical Systems\",\"volume\":\"35 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-05-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"14\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"19th IEEE International Conference on Micro Electro Mechanical Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2006.1627942\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"19th IEEE International Conference on Micro Electro Mechanical Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2006.1627942","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Rotary RF MEMS Switch Based on the Wobble Motor Principle
A novel, truly rotary, single-pole eight-throw (SP8T) RF MEMS switch is reported. The concept is an adaptation of the axial-gap electrostatic wobble motor. Details of the switch design and fabrication process are presented, together with initial test results for prototype devices. DC contact resistance measurements have been made over half a million rotations, yielding an average contact resistance of 2.5 Ω. The switch shows promising RF performance, with insertion loss varying smoothly from 0.6 dB at 2 GHz to 4 dB at 20 GHz, and isolation better than 31 dB across the frequency range 0.5 to 20 GHz.
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