一个新的嵌入式芯片封装- WFOP™

Tomoko Takahashi, H. Inoue, Takahiro Yada, Naoki Hayashi, Yukari Imaizumi, Y. Ikemoto, Shigenori Sawachi, Atsushi Furuno, K. Yoshimitsu, M. Ooida, Akio Katsumata, Y. Hiruta
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引用次数: 2

摘要

开发了一种用于下一代嵌入式芯片封装的新封装结构和技术,称为WFOP™(宽面板扇出封装)。它是一种面朝下的安装方式,使用金属板作为其再分配层的底板。制造不是在晶圆规模上完成的,而是在大型面板衬底上完成的。介绍了该系统的结构、工艺、可靠性结果及部分性能。WFOP的封装组装技术采用嵌模法。因此,这项技术也可以应用于3D包装。本文给出了一些三维包装的经验。这项技术有望引领下一代新的封装技术。
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A new embedded die package — WFOP™
A new package structure and technology for the next generation of embedded-die package named as WFOP™ (Wide panel Fan-Out Package) was developed. It's a facedown mounting type, using metal plate as the base plate of its redistributed layer. Manufacturing is done not in wafer scale, but in large scale panel substrate. The structure, process, reliability results, and some performance are introduced. The package assembly technology for WFOP is using die-embedding method. So the technology is also able to apply to 3D packages. Some experience of 3D packages is shown in this paper. This technology will be expected to lead a new packaging technology for the next generation.
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