{"title":"电致热刺激forMEMS测试","authors":"N. Dumas, F. Azaïs, L. Latorre, P. Nouet","doi":"10.1109/ETSYM.2004.1347605","DOIUrl":null,"url":null,"abstract":"The development of low-cost go/no-go procedures for MEMS production testing is one of the main issues of MEMS manufacturability. In particular, the generation of low-cost test stimuli is a real challenge. In this paper, we investigate the generation of electrically-induced thermal stimuli to test electro-mechanical structures. Static, transient and harmonic responses are studied and it is demonstrated that they can be used for efficient detection and classification of several faulty devices.","PeriodicalId":358790,"journal":{"name":"Proceedings. Ninth IEEE European Test Symposium, 2004. ETS 2004.","volume":"29 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":"{\"title\":\"Electrically-induced thermal stimuli forMEMS testing\",\"authors\":\"N. Dumas, F. Azaïs, L. Latorre, P. Nouet\",\"doi\":\"10.1109/ETSYM.2004.1347605\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The development of low-cost go/no-go procedures for MEMS production testing is one of the main issues of MEMS manufacturability. In particular, the generation of low-cost test stimuli is a real challenge. In this paper, we investigate the generation of electrically-induced thermal stimuli to test electro-mechanical structures. Static, transient and harmonic responses are studied and it is demonstrated that they can be used for efficient detection and classification of several faulty devices.\",\"PeriodicalId\":358790,\"journal\":{\"name\":\"Proceedings. Ninth IEEE European Test Symposium, 2004. ETS 2004.\",\"volume\":\"29 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-05-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"8\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings. Ninth IEEE European Test Symposium, 2004. ETS 2004.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ETSYM.2004.1347605\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings. Ninth IEEE European Test Symposium, 2004. ETS 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ETSYM.2004.1347605","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The development of low-cost go/no-go procedures for MEMS production testing is one of the main issues of MEMS manufacturability. In particular, the generation of low-cost test stimuli is a real challenge. In this paper, we investigate the generation of electrically-induced thermal stimuli to test electro-mechanical structures. Static, transient and harmonic responses are studied and it is demonstrated that they can be used for efficient detection and classification of several faulty devices.
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