使用SU-8 2002用于聚焦控制的聚合物可变形膜镜

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607867

E. Dunbar, M. Leone, S. Lukes, D. Dickensheets

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引用次数: 6

摘要

设计了大行程可变形膜反射镜，用于一次聚焦控制和焦致球差补偿。SU-8 2002环氧膜2微米厚，高达1厘米直径，对称铝涂层，描述。

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Polymer deformable membrane mirrors for focus control using SU-8 2002

Large stroke deformable membrane mirrors are designed for primary focus control and compensation of focus-induced spherical aberration. SU-8 2002 epoxy membranes 2 mum thick and up to 1 cm diameter, with symmetric aluminum coatings, are described.

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2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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