基于可变节距均匀发光二维亚波长光栅的纳米结构有效折射率微光器件

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607825

D. Dickensheets, H. Herzig, W. Nakagawa, K. Suter, U. Staufer

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引用次数: 3

摘要

亚波长二维光栅是通过在硅上刻蚀孔，然后热氧化而形成的。在可变光栅间距上使用均匀的孔，可以实现平滑渐变的有效折射率燃烧，表现出最小的蚀刻滞后。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Nanostructured effective-index micro-optical devices based on blazed 2-D sub-wavelength gratings with uniform features on a variable-pitch

Sub-wavelength two-dimensional gratings are formed by etching holes into silicon using DRIE followed by thermal oxidation. Smoothly graded effective index blazing is possible using uniform holes on a variable grating pitch, exhibiting minimal etch lag.

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2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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