{"title":"SOLT和LRRM校准标准的灵敏度分析","authors":"A. Safwat, L. Hayden","doi":"10.1109/ARFTG.2001.327488","DOIUrl":null,"url":null,"abstract":"We investigate the sensitivity of SOLT and LRRM on wafer calibrations to probe positioning. Calibration comparison derived error-bounds were calculated for data sets differing only by a single change in probe/standard overlap. The SOLT calibration was found to be significantly more sensitive to probe placement variations, consistent with theoretical predictions.","PeriodicalId":331830,"journal":{"name":"58th ARFTG Conference Digest","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2001-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"35","resultStr":"{\"title\":\"Sensitivity Analysis of Calibration Standards for SOLT and LRRM\",\"authors\":\"A. Safwat, L. Hayden\",\"doi\":\"10.1109/ARFTG.2001.327488\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We investigate the sensitivity of SOLT and LRRM on wafer calibrations to probe positioning. Calibration comparison derived error-bounds were calculated for data sets differing only by a single change in probe/standard overlap. The SOLT calibration was found to be significantly more sensitive to probe placement variations, consistent with theoretical predictions.\",\"PeriodicalId\":331830,\"journal\":{\"name\":\"58th ARFTG Conference Digest\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"35\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"58th ARFTG Conference Digest\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ARFTG.2001.327488\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"58th ARFTG Conference Digest","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ARFTG.2001.327488","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Sensitivity Analysis of Calibration Standards for SOLT and LRRM
We investigate the sensitivity of SOLT and LRRM on wafer calibrations to probe positioning. Calibration comparison derived error-bounds were calculated for data sets differing only by a single change in probe/standard overlap. The SOLT calibration was found to be significantly more sensitive to probe placement variations, consistent with theoretical predictions.
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