基于COMSOL MultiphysicsR的MEMS能量采集器件功率输出建模研究

2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) Pub Date : 2013-04-14 DOI:10.1109/EUROSIME.2013.6529988

R. O'Keeffe, N. Jackson, F. Waldron, M. O'Niell, K. McCarthy, A. Mathewson

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引用次数: 16

摘要

建立了COMSOL MultiphysicsR模型，该模型提供了ALN压电器件的谐振频率、应力和功率输出的准确信息。谐振频率的最大误差为4%。该模型准确地预测了外部阻抗输出功率的变化趋势以及最大能量收集的匹配阻抗。还对1g加速度下的预期电压和电流输出进行了建模。

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Investigation into modelling power output for MEMS energy harvesting devices using COMSOL MultiphysicsR

A COMSOL MultiphysicsR model was created which provides accurate information on the resonant frequency, stress and power output of an ALN piezoelectric device. The maximum error in the resonant frequency was found to be 4%. The models accurately predicted the trend of the output power for external impedances as well as the matched impedance for maximum energy harvesting. The expected voltage and current output for 1g acceleration was also be modeled.

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2013 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

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