CMOS射频可靠性评估的测试结构

L. Heiß, Andreas Lachmann, R. Schwab, G. Panagopoulos, Peter Baumgartner, Mamatha Yakkegondi Virupakshappaa, D. Schmitt-Landsiedel
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引用次数: 0

摘要

这项工作提出了一种改进的CMOS射频可靠性评估方法与片上交流应力电路。与以往的工作相比,高频应力信号不仅可以在片上产生,而且可以通过片上示波器(OCO)进行监测。来自HKMG技术的实验数据强调,如果没有OCO,现有的测试结构在交流和射频应力下往往会导致错误的结果。
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Test structures for CMOS RF reliability assessment
This work presents an improved methodology for CMOS RF reliability assessment with on-chip AC stress circuits. Compared to previous work high frequency stress signals are not only generated on-chip, but are also monitored by an on-chip oscilloscope (OCO). Experimental data from a HKMG technology highlight that without the OCO, existing test structures often lead to misinterpreted results under AC and RF stress.
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