Integrated micromachined components for biological analysis systems

In this paper, we provide an overview of miniaturized biochemical analysis system components and specifically discuss the micromachined metallic pipette arrays (MPA) and the micromachined electrical field-flow fractionation system (μ-EFFF). The MPA are arrays of hollow metallic pipettes extending from a silicon substrate. These arrays are used in macroscale spatial manipulation of samples in the pl to μl range. The μ-EFFF system is composed of a micromachined flow channel with integrated electrodes for application of static electric fields. The system is used for separation and analysis of biological molecules and colloids. The design, fabrication, and characterization of the MPA and the μ-EFFF are described. In addition, the integration of the components using micromechatronics technologies is discussed.