热处理对真空蒸发制备的SnS/ZnS薄膜显微组织的影响

Wenjun Wu, Wei-min Shi, Zhe Hu, Sheng Liu, Weiguang Yang, Guang-pu Wei
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摘要

在异质结系统中,利用SnS作为太阳能电池的吸收层。在这项工作中,选择无cd的ZnS材料作为窗口层。采用真空蒸发法制备了SnS和ZnS。退火在这一过程中起着相当大的作用,它将影响薄膜的晶体结构和组成。在本实验中,薄膜分别在300℃、400℃和500℃的N2气氛中退火。XRD图中,在29.2°和32.2°处观察到两个强衍射峰,分别对应于β-ZnS(111)和SnS(111)。SEM图像显示,膜的平均晶粒尺寸约为50 nm。退火后晶粒尺寸明显增大,晶粒间边界清晰。通过不同的退火工艺改变了SnS薄膜的电学性能。结果表明,ZnS/SnS结构是制备SnS太阳能电池的良好选择。
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Influence of heat treatment on the microstruture of SnS/ZnS film prepared by vacuum evaporation
In the heterojunction system, SnS was used as the absorption layer of solar cells. In this work, Cd-free ZnS material was selected as the window layer. SnS and ZnS were prepared by vacuum evaporation. Annealing plays a considerable role in the process which will affect the crystal structure and composition of the film. In this experiment, the films were annealed at temperature 300°C, 400°C and 500°C in N2 atmosphere. In XRD diagram, two strong diffraction peaks at 29.2° and 32.2° were observed, corresponding to β-ZnS (111) and SnS (111), respectively. SEM images show that average grain size of the film is about 50 nm. Noticeable increase of grain size and clear boundaries between grains were found after annealing. The electrical properties of the SnS thin films were changed through varying annealing processes. All the results indicate that ZnS/SnS structure is a good choice of SnS solar cells.
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