基于选择性面积异质外延的InGaAs/GaAs多量子阱微盘激光器生长优化

Bei Shi, Si Zhu, B. Song, J. Klamkin
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引用次数: 1

摘要

在平底(001)硅凹槽上选择性地生长InGaAs/GaAs多量子阱,并通过引入GaAsP应变补偿层提高了其效率。随后制备了微盘室温激光,产生了低激光阈值。
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Growth Optimization of InGaAs/GaAs Multi Quantum Well Microdisk Lasers on Flat-bottom CMOS-compatible (001) Si by Selective Area Heteroepitaxy
InGaAs/GaAs multi-quantum wells were selectively grown on flat-bottom (001) silicon recesses and their efficiencies were improved by introducing GaAsP strain compensation layers. Room-temperature lasing from microdisks were subsequently fabricated and yield low lasing threshold.
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