罗切斯特理工学院半导体制造CIM系统的实现

IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop Pub Date : 1990-09-11 DOI:10.1109/ASMC.1990.111231

L. Fuller

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引用次数: 9

摘要

介绍了一种计算机集成制造(CIM)系统，该系统已安装在罗切斯特理工学院，以支持学生运行的集成电路工厂。介绍了所选用的硬件和软件。讨论了系统的性能。概述了项目的状态、长期目标和额外的教育活动。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Implementation of a CIM system for semiconductor manufacturing at Rochester Institute of Technology

A computer-integrated-manufacturing (CIM) system which has been installed at the Rochester Institute of Technology to support a student-run integrated-circuit factory is described. The hardware and software selected are described. The capabilities of the system are discussed. The status of the project, long-term goals, and additional educational activities are outlined.<>

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IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop

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