玻璃微透镜与硅梳状驱动X-Y微台集成的研究

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607882

K. Laszczyk, S. Bargiel, C. Gorecki, J. Krężel

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引用次数: 9

摘要

我们提出了一种硅X-Y微台的设计和制造，并提出了将其与玻璃微透镜集成的新概念，以获得用于微型化芯片上显微镜的光学二维扫描仪。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Towards integration of glass microlens with silicon comb-drive X-Y microstage

We present the design and the fabrication of a silicon X-Y microstage and a new concept of its integration with a glass microlens to obtain an optical 2D scanner for the miniaturized microscope on-chip.

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2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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