用于片上微粒操作的电容检测电路

2014 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK) Pub Date : 2014-06-19 DOI:10.1109/IMFEDK.2014.6867083

Rie Yamane, H. Iwasaki, Yoshiaki Dei, J. Cui, T. Matsuoka

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引用次数: 2

摘要

本研究提出一种用于片上微粒子操作的电容检测电路。设计的电路采用基于电荷的电容测量技术，将电容值转换为数字输出码。实验结果表明，电容测量误差在4ff以内。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A capacitance detection circuit for on-chip microparticle manipulation

This study proposes a capacitance detection circuit for on-chip microparticle manipulation. The designed circuit employs the charge-based capacitance measurement technique to convert a capacitance value to a digital output code. Experimental results reveal capacitance measurement within error of 4 fF.

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2014 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK)

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