半导体电子元件的ESD鉴定和测试

V. Gross, S. Voldman, W. Guthrie
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引用次数: 2

摘要

静电放电(ESD)标准、鉴定和测试技术跟不上产品和封装类型、芯片架构、数字/模拟混合信号应用、多芯片模块(MCM)封装和三维硅封装的广泛发展。ESD测试标准主要集中在脉冲波形和测试仪上,没有解决半导体行业的步伐和变化趋势。例如,大多数ESD事件模拟器不能充分解决具有高引脚数、高容量测试和软件需求的产品。本文讨论了我们对驱动产品芯片和新封装环境上ESD学习所需的那些调整的看法。还讨论了ESD测试方法、晶圆级测试系统、封装效果、模拟和MCM ESD测试。
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ESD qualification and testing of semiconductor electronic components
Electrostatic discharge (ESD) standards, qualification and testing techniques are not keeping pace with the wide proliferation of product and package types, chip architectures, digital/analog mixed signal applications, multichip module (MCM) packages, and three-dimensional silicon packages. ESD test standards are primarily focused on impulse wave forms and testers and are not addressing the pace and changing trend of the semiconductor industry. For example, most ESD event simulators are not adequately addressing product with high pin counts, high-volume testing, and software needs. This paper discusses our perspective of those adjustments needed to drive ESD learning on product chips and of new package environments. Also discussed are ESD testing methodologies, wafer-level test systems, packaging effects, simulation, and MCM ESD testing.
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