基于模块化测试芯片的铜线键合可靠性评估

A. Trigg, C. T. Chong, Sheryl Yong Puay Fen, Jasmond Lee Thiam Kwee, Calvin Chua Hung Ming, Sharon Chan Sok Mung, Chen Ping, V. Ganesh, By Low, T. Chu, E. P. Leng
{"title":"基于模块化测试芯片的铜线键合可靠性评估","authors":"A. Trigg, C. T. Chong, Sheryl Yong Puay Fen, Jasmond Lee Thiam Kwee, Calvin Chua Hung Ming, Sharon Chan Sok Mung, Chen Ping, V. Ganesh, By Low, T. Chu, E. P. Leng","doi":"10.1109/EPTC.2012.6507072","DOIUrl":null,"url":null,"abstract":"The use of copper wire for wire bonding integrated circuits (ICs) has increased significantly in recent years, driven mainly by the dramatic increase in the cost of gold. The technical advantages and limitations, particularly with respect to reliability, of copper for wire bonding, compared with gold, have been widely reported. This paper describes reliability studies comparing on copper, palladium coated copper and gold wires using a dedicated test vehicle comprising a modular test chip with multiple daisy chains and corrosion sensors in a BGA package. The reliability tests were High Temperature Storage (HTS), 1000 hours at 150 ºC, Thermal cycling (TC) from 1000 cycles from −40 ºC to + 125 ºC, Temperature Humidity Bias (THB), 1000 hours at 85ºC/85% RH, 20 V applied, and unbiased HAST. It was found that performance was strongly dependent on the wire type and mold compound. Copper wires with one mold compound having a higher chlorine level (12mmm), showed high leakage currents and rates of failure during THB. Both copper and palladium coated copper wires with a different mold compound showed high rates of failure during thermal cycling.","PeriodicalId":431312,"journal":{"name":"2012 IEEE 14th Electronics Packaging Technology Conference (EPTC)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Copper wire bond reliability evaluation using a modular test chip\",\"authors\":\"A. Trigg, C. T. Chong, Sheryl Yong Puay Fen, Jasmond Lee Thiam Kwee, Calvin Chua Hung Ming, Sharon Chan Sok Mung, Chen Ping, V. Ganesh, By Low, T. Chu, E. P. Leng\",\"doi\":\"10.1109/EPTC.2012.6507072\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The use of copper wire for wire bonding integrated circuits (ICs) has increased significantly in recent years, driven mainly by the dramatic increase in the cost of gold. The technical advantages and limitations, particularly with respect to reliability, of copper for wire bonding, compared with gold, have been widely reported. This paper describes reliability studies comparing on copper, palladium coated copper and gold wires using a dedicated test vehicle comprising a modular test chip with multiple daisy chains and corrosion sensors in a BGA package. The reliability tests were High Temperature Storage (HTS), 1000 hours at 150 ºC, Thermal cycling (TC) from 1000 cycles from −40 ºC to + 125 ºC, Temperature Humidity Bias (THB), 1000 hours at 85ºC/85% RH, 20 V applied, and unbiased HAST. It was found that performance was strongly dependent on the wire type and mold compound. Copper wires with one mold compound having a higher chlorine level (12mmm), showed high leakage currents and rates of failure during THB. Both copper and palladium coated copper wires with a different mold compound showed high rates of failure during thermal cycling.\",\"PeriodicalId\":431312,\"journal\":{\"name\":\"2012 IEEE 14th Electronics Packaging Technology Conference (EPTC)\",\"volume\":\"54 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 IEEE 14th Electronics Packaging Technology Conference (EPTC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EPTC.2012.6507072\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 IEEE 14th Electronics Packaging Technology Conference (EPTC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EPTC.2012.6507072","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5

摘要

近年来,铜线用于线键合集成电路(ic)的使用显着增加,主要是由于黄金成本的急剧增加。与金相比,铜用于线键合的技术优势和局限性,特别是在可靠性方面,已被广泛报道。本文介绍了使用专用测试车对铜线、镀钯铜线和金线的可靠性进行比较研究,该测试车由BGA封装中包含多个菊花链和腐蚀传感器的模块化测试芯片组成。可靠性测试包括高温储存(HTS),在150ºC下1000小时,热循环(TC),从−40ºC到+ 125ºC, 1000个循环,温度湿度偏置(THB),在85ºC/85% RH, 20 V和无偏HAST下1000小时。结果发现,其性能与线材类型和模具化合物有很大关系。一种具有较高氯含量(12mm)的模具化合物的铜线在THB期间显示出高泄漏电流和故障率。在热循环过程中,用不同的模具化合物涂覆铜和钯的铜线都显示出高的失败率。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Copper wire bond reliability evaluation using a modular test chip
The use of copper wire for wire bonding integrated circuits (ICs) has increased significantly in recent years, driven mainly by the dramatic increase in the cost of gold. The technical advantages and limitations, particularly with respect to reliability, of copper for wire bonding, compared with gold, have been widely reported. This paper describes reliability studies comparing on copper, palladium coated copper and gold wires using a dedicated test vehicle comprising a modular test chip with multiple daisy chains and corrosion sensors in a BGA package. The reliability tests were High Temperature Storage (HTS), 1000 hours at 150 ºC, Thermal cycling (TC) from 1000 cycles from −40 ºC to + 125 ºC, Temperature Humidity Bias (THB), 1000 hours at 85ºC/85% RH, 20 V applied, and unbiased HAST. It was found that performance was strongly dependent on the wire type and mold compound. Copper wires with one mold compound having a higher chlorine level (12mmm), showed high leakage currents and rates of failure during THB. Both copper and palladium coated copper wires with a different mold compound showed high rates of failure during thermal cycling.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Mechanical characterization of wafer level bump-less Cu-Cu bonding Process development to enable die sorting and 3D IC stacking Analysis of cracking in brittle substrate Through-Silicon Interposer (TSI) co-design optimization for high performance systems Effect of thermomechanical fatigue on drop impact properties of Sn-Ag-Cu lead-free solder joints
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1