隧道效应和反转层量化效应对深亚微米MOSFET的影响

Xiaoyan Liu, Jinfeng Kang, R. Han
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引用次数: 0

摘要

在研究超薄栅氧化MOSFET反演层中电子的二维性质的基础上,建立了隧道效应和反演层量化效应对深亚微米MOSFET阈值电压的影响模型。利用该模型可以估计隧道效应和反转层量化效应对MOSFET阈值电压的影响。
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The influence of tunneling effect and inversion layer quantization effect on deep submicron MOSFET
Based on the studies of the two dimensional nature of electrons in inversion layer of the ultra thin gate oxide MOSFET model to describe tunneling effect and inversion layer quantization effect on deep submicron MOSFET's threshold voltage is developed. By using of this model the influence of tunneling effect and the inversion layer quantization effect on the MOSFET threshold voltage can be estimated.
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