测量微测热计结构热时间常数的简单技术

ICMTS 1999. Proceedings of 1999 International Conference on Microelectronic Test Structures (Cat. No.99CH36307) Pub Date : 1999-03-15 DOI:10.1109/ICMTS.1999.766239

P. Lambkin, N. Folan, B. Lane

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引用次数: 4

摘要

提出了一种测定微测热计结构热时间常数的简单电技术。用LCR计对微辐射热计进行阻抗测量表明，相位滞后/超前随频率的变化达到最大值。结果表明，最大相位差的频率与热时间常数有简单的关系。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Simple technique for the measurement of thermal time constants of microbolometer structures

A straightforward electrical technique for determining the thermal time constant of microbolometer structures is presented. An impedance measurement of a microbolometer using an LCR meter shows that the phase lag/lead reaches a maximum as a function of frequency. It is shown that the frequency of maximum phase difference is simply related to the thermal time constant.

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ICMTS 1999. Proceedings of 1999 International Conference on Microelectronic Test Structures (Cat. No.99CH36307)

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