Qingzhu Zhang, H. Tu, H. Yin, F. Wei, Hongbin Zhao, Chunling Xue, Qianhui Wei, Zhaohao Zhang, Xiao Zhang, Shaoming Zhang, Q. Han, Yudong Li, R. Zhao, Jiang Yan, Junfeng Li, Wenwu Wang
{"title":"利用FinFET制造工艺实时监测细胞离子活性的硅纳米线生物传感器","authors":"Qingzhu Zhang, H. Tu, H. Yin, F. Wei, Hongbin Zhao, Chunling Xue, Qianhui Wei, Zhaohao Zhang, Xiao Zhang, Shaoming Zhang, Q. Han, Yudong Li, R. Zhao, Jiang Yan, Junfeng Li, Wenwu Wang","doi":"10.1109/IEDM.2018.8614649","DOIUrl":null,"url":null,"abstract":"In this paper, a biocompatible biosensor based on horizontal Si nanowire (NW) array field-effect transistor (FET) has been fabricated by the feasible spacer image transfer (SIT) process. The Si NW FET as biosensor is proposed for the realtime cellular Ca2+ monitoring for mesenchymal stem cells (MSCs), which presents fast-responded and high-sensitive characteristics. Compared with the conventional sensing techniques, the Si NW biosensor exhibits non-invasive, biocompatible and reliable advantages. This will help us to further understand the mechanism of cellular ion activities and provides a promising method for the cell-level diagnose and therapy.","PeriodicalId":152963,"journal":{"name":"2018 IEEE International Electron Devices Meeting (IEDM)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":"{\"title\":\"Si Nanowire Biosensors Using a FinFET Fabrication Process for Real Time Monitoring Cellular Ion Actitivies\",\"authors\":\"Qingzhu Zhang, H. Tu, H. Yin, F. Wei, Hongbin Zhao, Chunling Xue, Qianhui Wei, Zhaohao Zhang, Xiao Zhang, Shaoming Zhang, Q. Han, Yudong Li, R. Zhao, Jiang Yan, Junfeng Li, Wenwu Wang\",\"doi\":\"10.1109/IEDM.2018.8614649\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, a biocompatible biosensor based on horizontal Si nanowire (NW) array field-effect transistor (FET) has been fabricated by the feasible spacer image transfer (SIT) process. The Si NW FET as biosensor is proposed for the realtime cellular Ca2+ monitoring for mesenchymal stem cells (MSCs), which presents fast-responded and high-sensitive characteristics. Compared with the conventional sensing techniques, the Si NW biosensor exhibits non-invasive, biocompatible and reliable advantages. This will help us to further understand the mechanism of cellular ion activities and provides a promising method for the cell-level diagnose and therapy.\",\"PeriodicalId\":152963,\"journal\":{\"name\":\"2018 IEEE International Electron Devices Meeting (IEDM)\",\"volume\":\"5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"12\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 IEEE International Electron Devices Meeting (IEDM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IEDM.2018.8614649\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE International Electron Devices Meeting (IEDM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2018.8614649","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Si Nanowire Biosensors Using a FinFET Fabrication Process for Real Time Monitoring Cellular Ion Actitivies
In this paper, a biocompatible biosensor based on horizontal Si nanowire (NW) array field-effect transistor (FET) has been fabricated by the feasible spacer image transfer (SIT) process. The Si NW FET as biosensor is proposed for the realtime cellular Ca2+ monitoring for mesenchymal stem cells (MSCs), which presents fast-responded and high-sensitive characteristics. Compared with the conventional sensing techniques, the Si NW biosensor exhibits non-invasive, biocompatible and reliable advantages. This will help us to further understand the mechanism of cellular ion activities and provides a promising method for the cell-level diagnose and therapy.
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