A. Barlian, R. Narain, J.T. Li, C.E. Quance, A. Ho, V. Mukundan, B. Pruitt
{"title":"压阻式MEMS水下剪应力传感器","authors":"A. Barlian, R. Narain, J.T. Li, C.E. Quance, A. Ho, V. Mukundan, B. Pruitt","doi":"10.1109/MEMSYS.2006.1627877","DOIUrl":null,"url":null,"abstract":"We report on the design and performance of underwater piezoresistive floating-element shear stress sensors for direct dynamic measurements. Our design utilizes sidewall-implanted piezoresistors to measure lateral force and infer shear stress, and traditional top-implanted piezoresistors to detect normal forces and pressure transients. A gravity-driven flume was used to test the sensors. FEMLAB simulation and microscale Particle Image Velocimetry experiments were used to characterize the flow disturbance over different gap sizes. The results show no detectable disturbance of the flow over the range of sensor gap sizes evaluated (5-20 µ m).","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"24 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"17","resultStr":"{\"title\":\"Piezoresistive MEMS Underwater Shear Stress Sensors\",\"authors\":\"A. Barlian, R. Narain, J.T. Li, C.E. Quance, A. Ho, V. Mukundan, B. Pruitt\",\"doi\":\"10.1109/MEMSYS.2006.1627877\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report on the design and performance of underwater piezoresistive floating-element shear stress sensors for direct dynamic measurements. Our design utilizes sidewall-implanted piezoresistors to measure lateral force and infer shear stress, and traditional top-implanted piezoresistors to detect normal forces and pressure transients. A gravity-driven flume was used to test the sensors. FEMLAB simulation and microscale Particle Image Velocimetry experiments were used to characterize the flow disturbance over different gap sizes. The results show no detectable disturbance of the flow over the range of sensor gap sizes evaluated (5-20 µ m).\",\"PeriodicalId\":250831,\"journal\":{\"name\":\"19th IEEE International Conference on Micro Electro Mechanical Systems\",\"volume\":\"24 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-05-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"17\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"19th IEEE International Conference on Micro Electro Mechanical Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2006.1627877\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"19th IEEE International Conference on Micro Electro Mechanical Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2006.1627877","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
We report on the design and performance of underwater piezoresistive floating-element shear stress sensors for direct dynamic measurements. Our design utilizes sidewall-implanted piezoresistors to measure lateral force and infer shear stress, and traditional top-implanted piezoresistors to detect normal forces and pressure transients. A gravity-driven flume was used to test the sensors. FEMLAB simulation and microscale Particle Image Velocimetry experiments were used to characterize the flow disturbance over different gap sizes. The results show no detectable disturbance of the flow over the range of sensor gap sizes evaluated (5-20 µ m).
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