基于二硫化钼纳米片的电阻式气体传感器，对低NO2浓度具有高响应

2021 13th Spanish Conference on Electron Devices (CDE) Pub Date : 2021-06-09 DOI:10.1109/CDE52135.2021.9455718

I. Sayago, C. Sánchez-Vicente, J. Sanjurjo, J.P. Santos, S. Ogilvie, H. J. Wood, A. A. Graf, M. Large, A. Dalton, R. Garriga, E. Muñoz

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摘要

本文报道了基于二硫化钼纳米材料的二维电阻式气体传感器及其对亚ppm NO2浓度的响应。通过在氮化硅悬浮膜上滴铸二硫化钼纳米片制备了该敏感材料。在高达300°C的工作温度下，研究了传感器的响应。制备的传感器在室温下对低至20 ppb的NO2浓度有良好的响应。本文讨论了n型二硫化钼的传感机理。

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Resistive gas sensors based on MoS2 nanosheets with high response to low NO2 concentrations

This work reports on two-dimensional MoS2 nanomaterial-based resistive gas sensors and their response to sub-ppm NO2 concentrations. The sensitive material was prepared by drop-casting MoS2 nanosheet dispersions on silicon nitride suspended membranes. The sensor response was studied at operating temperatures up to 300 °C. The fabricated sensors provided good responses to NO2 concentrations as low as 20 ppb at room temperature. The n-type MoS2 sensing mechanism is here discussed.

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2021 13th Spanish Conference on Electron Devices (CDE)

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