FEOL湿法清洁工艺良率提高的实例研究

2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Pub Date : 2019-05-01 DOI:10.1109/ASMC.2019.8791786

R. Mitra, Zhiyong Xie

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摘要

生产线末端的晶圆片显示产量损失。数据科学有助于在生产线前端(FEOL)的特定步骤序列中关联许多清洁工具/室。建立了多种模式和机制。本文报道了调查和实验结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A Case Study of Yield Improvement in a FEOL Wet Clean Process

Wafers at end-of-line showed yield loss. Data Science helped to correlate to numerous clean tools/chambers at a particular step sequence in Front End of Line (FEOL). Various models and mechanisms were established. The investigation and experiments conducted are reported in this paper.

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2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

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