剪切应变对硅中导带的影响:一个有效的两带k·p理论

V. Sverdlov, E. Ungersboeck, H. Kosina, S. Selberherr
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引用次数: 24

摘要

我们提出了一个有效的两波段kldrp理论,它准确地描述了硅中六个最低导带谷。通过与全带伪势计算的比较,我们证明了该模型既能捕捉到非抛物线效应,也能捕捉到一般应力条件下应力引起的带结构变化。它再现了有效质量与非抛物性参数的应力依赖关系。得到并分析了由单轴应力[110]引起的谷移和横向和纵向有效质量修正的解析表达式。在任意小体厚度的{001}SOI fet中,在拉伸[110]应力方向上的低场迁移率增强是由于电导率质量的改变,并且在高应力值下非抛物线性的增加在一定程度上阻碍了这一点。
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Effects of shear strain on the conduction band in silicon: An efficient two-band k·p theory
We present an efficient two-band kldrp theory which accurately describes the six lowest conduction band valleys in silicon. By comparing the model with full band pseudo-potential calculations we demonstrate that the model captures both the nonparabolicity effects and the stress-induced band structure modification for general stress conditions. It reproduces the stress dependence of the effective masses and the nonparabolicity parameter. Analytical expressions for the valley shifts and the transversal and longitudinal effective mass modifications induced by uniaxial [110] stress are obtained and analyzed. The low-field mobility enhancement in the direction of tensile [110] stress in {001} SOI FETs with arbitrary small body thickness is due to a modification of the conductivity mass and is shown to be partly hampered by an increase in nonparabolicity at high stress value.
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