A. Niembro-Martin, D. Mercier, H. Sibuet, B. Dieppedale, C. Baret, C. Bonnard, C. Billard, P. Gardes, P. Poveda
{"title":"基于两个MIM电容器阻抗差的薄膜介质表征方法分析","authors":"A. Niembro-Martin, D. Mercier, H. Sibuet, B. Dieppedale, C. Baret, C. Bonnard, C. Billard, P. Gardes, P. Poveda","doi":"10.23919/EUMIC.2017.8230666","DOIUrl":null,"url":null,"abstract":"This paper presents an analysis of a thin film dielectric characterization method based on the impedance difference of two circular capacitors. For the first time, an error study is detailed in order to define what the best case to use the method is. To illustrate the study, the method has been applied for two dielectrics with extremely different RF properties: silicon nitride (low permittivity and low loss tangent) and Barium Calcium Zirconate Titanate (very high permittivity and high loss tangent).","PeriodicalId":120932,"journal":{"name":"2017 12th European Microwave Integrated Circuits Conference (EuMIC)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Analysis of a thin film dielectric characterization method based on the impedance difference of two MIM capacitors\",\"authors\":\"A. Niembro-Martin, D. Mercier, H. Sibuet, B. Dieppedale, C. Baret, C. Bonnard, C. Billard, P. Gardes, P. Poveda\",\"doi\":\"10.23919/EUMIC.2017.8230666\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents an analysis of a thin film dielectric characterization method based on the impedance difference of two circular capacitors. For the first time, an error study is detailed in order to define what the best case to use the method is. To illustrate the study, the method has been applied for two dielectrics with extremely different RF properties: silicon nitride (low permittivity and low loss tangent) and Barium Calcium Zirconate Titanate (very high permittivity and high loss tangent).\",\"PeriodicalId\":120932,\"journal\":{\"name\":\"2017 12th European Microwave Integrated Circuits Conference (EuMIC)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 12th European Microwave Integrated Circuits Conference (EuMIC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.23919/EUMIC.2017.8230666\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 12th European Microwave Integrated Circuits Conference (EuMIC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/EUMIC.2017.8230666","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Analysis of a thin film dielectric characterization method based on the impedance difference of two MIM capacitors
This paper presents an analysis of a thin film dielectric characterization method based on the impedance difference of two circular capacitors. For the first time, an error study is detailed in order to define what the best case to use the method is. To illustrate the study, the method has been applied for two dielectrics with extremely different RF properties: silicon nitride (low permittivity and low loss tangent) and Barium Calcium Zirconate Titanate (very high permittivity and high loss tangent).
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
