去极化场诱导的HfO2基铁电场效应管极化态不稳定性

Zheng Wang, M. M. Islam, Panni Wang, Shan Deng, Shimeng Yu, A. Khan, K. Ni
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引用次数: 7

摘要

掺杂的HfO2基铁电场效应晶体管(FeFET)由于具有较大的矫顽力场,在保留过程中可以防止畴翻转,因此与钙钛矿基相比,其保留性能大大提高。然而,在这项工作中,通过广泛的温度相关实验表征和建模,我们证明了:1)随着FeFET几何缩放,极化态不再稳定,而是表现出多步退化,导致可区分相邻能级的感觉裕度降低,甚至最终导致记忆窗口崩溃;2)不稳定性是由于去极化场应力作用下开关概率的温度激活积累,在工作温度下的保留时间内引起畴切换。
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Depolarization Field Induced Instability of Polarization States in HfO2 Based Ferroelectric FET
Doped HfO2 based ferroelectric FET (FeFET) exhibits a greatly improved retention performance compared with its perovskite counterpart due to its large coercive field, which prevents domain flip during retention. In this work, however, through extensive temperature dependent experimental characterization and modeling, we are demonstrating that: 1) with FeFET geometry scaling, the polarization states are no longer stable, but exhibit multi-step degradation and cause reduced sense margin in distinguishable adjacent levels or even eventual memory window collapse; 2) the instability is caused by the temperature activated accumulation of switching probability under depolarization field stress, which could cause domain switching within the retention time at operating temperatures.
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