界面断裂参数的确定:能量释放率和模态混合

I. Maus, H. Pape, H. Nabi, B. Michel, B. Wunderle
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引用次数: 4

摘要

界面分层是微电子工业中最重要的可靠性问题之一。因此,相关的研究越来越受到人们的关注。先进的有限元分析(FEA)的应用提供了一种理解、预测和总结防止可靠性问题的方法。关键界面断裂数据,包括临界(应变)能量释放率Gc(Ψ)作为温度、湿度或老化的函数,是微电子工业中与可靠性相关的失效建模、寿命预测和设计评估的关键数据[1],但在文献中很少给出。因此需要快速的测量方法[2,3,4]。对界面断裂力学关键数据的评估不仅需要测量,还需要并行进行模拟。本文采用的数值方法是裂纹表面位移外推法(CSDEM)[3,5]和虚拟裂纹闭合技术(VCCT)[3,4,6]。我们重点研究的接口是铜铅框架和环氧基胶模附件之间的接口。本文主要研究了微混合模态测试仪(μMMT)[2]对实物试样的临界断裂力学性能的测量方法及其数值评价,包括参数效应研究。
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Determination of interface fracture parameters: Energy Release Rate and Mode Mixity using FEA
Interfacial delamination IS one of the most important reliability issues in the microelectronic industry. On this account more and more focus is set on related research. The application of advanced Finite Element Analysis (FEA) provides a way to understand, predict and in conclusion to prevent reliability issues. Critical interface fracture data, which include the Critical (Strain) Energy Release Rate Gc(Ψ) as a function of temperature, humidity or aging, are crucially needed in microelectronic industry for failure modeling, lifetime prediction and design evaluation associated with reliability [1], but they are rarely given in literature. Therefore fast measurement methods are needed [2, 3, 4]. The evaluation of the critical data with respect to interfacial fracture mechanics needs not only measurements, but also simulations to be carried out in parallel. The numerical methods used in this work are the Crack Surface Displacement Extrapolation Method (CSDEM) [3, 5] and the Virtual Crack Closure Technique (VCCT) [3, 4, 6]. The interface we focus on is between Cu-Lead frame and epoxy-based glue-Die Attach. This work is focused on the measurement method of the critical fracture mechanic properties with the micro Mixed Mode Tester (μMMT) [2] on samples cut from real products and their numerical evaluation including parameter effect studies.
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