MicroOptoMechanical characterization of a mechanically deflected free-standing polymer waveguides

MEMS-based micro-optical devices have received increasing attention in the areas of information and optical communication. Among them, monolithically integrated optical devices show strong potential for small-size, high-density applications. The integrated optical devices require optical interconnections between movable (e.g. pickup) and stationary optical components (e.g. light source and detector). Conventional optical interconnection has been made by fiber-optic cables or waveguide channels on a flexible ribbon. In this paper, we propose a free-standing (or suspended) waveguide as a new optomechanical interconnection, that can act not only as an optical path but also as a mechanical suspension for an integrated optical device. This has motivated the study on the mechanical behavior and the optical characteristics of the free-standing waveguide. We experimentally characterize the micromechanical behavior and the optical loss of a mechanically deflected free-standing polymer waveguide. We especially focus on the evaluation of the waveguide bending loss, generated by mechanical deflection.