利用光伏激光刺激技术定位ESD缺陷:优化和解释

Proceedings of the 10th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2003 Pub Date : 2003-07-07 DOI:10.1109/IPFA.2003.1222761

T. Beauchêne, D. Lewis, P. Perdu, F. Beaudoin, P. Fouillat, A. Touboul

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引用次数: 1

摘要

研究了液晶或光电显微镜(PEM)等经典方法的替代定位技术。本文的目的是说明光束感应电流(OBIC)方法在精确定位和分析ESD缺陷方面的适用性，并提供一种全局OBIC方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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ESD defect localisation using photovoltaic laser stimulation techniques: optimization and interpretation

Alternative localization techniques to classical methods such as liquid crystal or photoemission microscopes (PEM) are studied. The aim of this article is to illustrate the suitability of Optical Beam Induced Current (OBIC) methods to accurately localize and analyze ESD defects, and to provide a global OBIC methodology.

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Proceedings of the 10th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2003

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