脉冲直流电迁移试验下焊点疲劳和蠕变棘轮失效的观察

Allison T. Osmanson, Y. Kim, C. Kim, P. Thompson, Qiao Chen, Sylvester Ankamah-Kusi
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引用次数: 1

摘要

最近对晶圆级芯片级封装(wcsp)在各种占空因子(df)或低频脉冲直流(pulse - dc)条件下的脉冲“开”/“关”比进行的电迁移(EM)测试揭示了脉冲直流电磁测试期间发生的串联失效机制:1)典型的电磁失效;2)热疲劳;3)棘轮蠕动。在高DF脉冲直流测试条件下,测试样品的横断面扫描电子显微镜(SEM)失效分析显示,在被测器件(DUT)焊料凸点与凸点金属化层(UBM)之间的界面附近,除了EM空洞外,裂纹还会扩展。裂纹和空洞表明,在脉冲“开”和“关”周期中,随着温度和应力的波动,位错滑动和位错增殖产生了显著的塑性变形和应变硬化。在适当的条件下,即使在少量的循环应力下,经过大量应变硬化的材料也容易发生疲劳失效。应力波动与这些微观机制的结合导致热疲劳,并与经典的电磁破坏机制结合,增强了电磁破坏动力学。电磁加速使这些样品比在直流下测试的样品具有更短的平均失效时间(MTTF)。同时,在低DF脉冲直流条件下测试的试样表现出蠕变棘轮破坏特征,且MTTF远长于基于经典累积损伤模型的预测。在低DF脉冲直流条件下测试的样品的横截面SEM失效分析揭示了蠕变棘齿失效的特征,从焊料凸起中挤出或移位焊料证明了这一点。假设在蠕变棘轮破坏发生之前,在低DF脉冲直流条件下允许的相对较长的松弛时间允许动态再结晶,从而通过形核变形释放疲劳的驱动力。与高DF脉冲直流条件相比,在低DF脉冲直流条件下而不是疲劳条件下观察到这种机制的预测原因是,动态再结晶机制比疲劳裂纹扩展机制需要更多的时间来主导。这两种机制基本上被认为是相互竞争的,而允许一种失效机制主导另一种失效机制的主要条件是DF,它决定了“开”vs。“关闭”。采用热疲劳和蠕变机制的有限元方法对这三种现象进行了研究。本研究对研究结果进行了讨论和介绍。
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Observation of Fatigue and Creep Ratcheting Failure in Solder Joints under Pulsed Direct Current Electromigration Testing
Recent electromigration (EM) testing of wafer-level chip scale packages (WCSPs) under various duty factors (DFs) or pulse "on"/"off" ratio, of low-frequency pulsed-direct current (pulsed-DC) conditions have uncovered the in-tandem failure mechanisms which occur during pulsed-DC EM testing: 1) classical EM failure by voiding; 2) thermal fatigue; and 3) creep ratcheting. Cross-sectional scanning electron microscope (SEM) failure analysis of samples tested under a high DF pulsed-DC testing condition revealed crack propagation in addition to EM voiding near the interface between the device under test (DUT) solder bump and the Cu under bump metallization (UBM) layer. The crack and void suggest that significant plastic deformation by, dislocation gliding and thus dislocation multiplication, and strain hardening occur with fluctuating temperature and stress during pulse "on" and "off" cycles. Under the right conditions, material which undergoes a significant amount of strain hardening becomes susceptible to fatigue failure even with a small amount of cyclic stress. The stress fluctuation combined with these microscopic mechanisms lead to thermal fatigue, which, combined with the classical EM failure mechanism, enhances the EM failure kinetics. The EM acceleration causes these samples to have shorter mean-time-to-failure (MTTF) than samples tested under DC. Meanwhile, samples tested under low DF pulsed-DC conditions showed failure features by creep ratcheting and had far longer MTTF than the predicted based on the classic cumulative damage model. Cross-sectional SEM failure analysis of samples tested under a low DF pulsed-DC condition uncovered features of creep ratcheting failure, evidenced by squeezed out or displaced solder material from the solder bump. It is hypothesized that until failure by creep ratcheting occurs, the relatively extended relaxation time allowed in low DF pulsed-DC conditions allow dynamic recrystallization, which releases the driving force for the fatigue by nucleating deformation free grains, to occur. The predicted reason why this mechanism is observed in low DF pulsed-DC conditions instead of fatigue, as compared to high DF pulsed-DC conditions, is that dynamic recrystallization mechanism requires more time to dominate than the fatigue crack propagation mechanism. The two mechanisms are essentially believed to compete with one another, and the primary condition which allows one failure mechanism to dominate over the other is the DF, which dictates the "on" vs. "off" time. The finite element method (FEM) of the stress associated with thermal fatigue and creep mechanisms is implemented to investigate these three phenomena. Findings of this research are discussed and presented in this study.
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