Sensor Reliability Assessment Model and Cost Analysis : ER: Equipment Reliability and Productivity Enhancements

Equipment failure can cause problems within the semiconductor industry, including product loss or contamination and unscheduled maintenance. In this paper, we apply Weibull analysis on electrochemical sensor failure and suspension data from the last eight years. Further analysis is achieved through breaking down the sensor data by model and chemistry. Using the Weibull parameters calculated and applying them to a simple financial model, we determine which sensor would give the best return on investment (ROI). The results shown in this paper will demonstrate a method for analyzing equipment or component reliability to better determine preventative maintenance practices and equipment selection based on facility operation and costs. It can be applied to a variety of equipment in a fabrication or manufacturing facility to provide a way to better plan for reliability and cost savings.