互连中电迁移现象的研究

H. Albrecht, J. Strogies
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摘要

消费电子产品的主要趋势是提高产品性能和降低成本。这些趋势导致封装级的持续集成,从而导致焊锡触点的尺寸减小。这与对热机械应力的更高敏感性以及由于界面和块状材料(如焊角或焊球)中的电迁移(EM)效应而形成的固有空洞有关。在芯片尺寸封装或其他小型化组件方面,随着高密度封装的发展,焊料凹凸互连的尺寸已显着减小。因此,对焊料凹凸处的电迁移行为进行评价是非常必要的。本文提出了评估试验,以测试不同的无铅焊料的电迁移电阻,并通过特殊的添加来减少界面和块体(SnAgCu, SnAg+, SnBi+, SnAgBiSb+)的材料传输现象。SnAgBiIn +)。具有足够电流密度的微型化互连正在研究引起电迁移的现象,这种现象与高密度电子流和焦耳加热引起的金属原子扩散有关,可以在空隙等方面产生局部缺陷。随着互连结构的快速小型化,抗电迁移的焊料材料和接口受到越来越多的关注。除此之外,对于电力电子应用,可接受的电流密度必须与设计导向的结构参数进行比较,包括模具背面金属化、凹凸或球形互连以及封装和周围区域布线解决方案的Cu宽度和厚度。结果将讨论电磁的风险和稳定接口的解决方案。在铜径线尺寸、电和热界面、施加的电流密度、更高的工作温度和功率模块垂直层堆叠中的金属化的影响下,扩展的电力电子应用也在研究电迁移效应。
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Investigations studying the electromigration phenomena in interconnects
The main trends in consumer electronics are increasing product performances and costs reduction. These trends lead to an ongoing integration on package level which leads to a decreasing size of the solder contacts. This goes along with a higher sensibility to thermal-mechanical stress and the immanent void formation due to electromigration (EM) effects in interfaces and bulk materials like solder fillets or solder balls Following the Flip Chip-Technology in terms of Chip Size Packages or other miniaturized components, the size of solder bump interconnects have been significantly reduced with the development of high-density packaging, and therefore the evaluation of the electromigration behavior in solder bumps is significantly required. The paper proposes evaluation trials to test the electromigration resistance of different Pb-free solders, also with special additions to minimize material transport phenomena at interfaces and in the bulk (SnAgCu, SnAg+, SnBi+, SnAgBiSb+. SnAgBiIn+). Miniaturized interconnects with sufficient current density are under investigation to cause electromigration as phenomena concerning the diffusion of metallic atoms induced by high density electron flow and Joule heating, that can create local defects in terms of voids, etc. With the rapid downsizing of interconnections, the electromigration-resistant solder material and interfaces becomes more interest. In addition to that, for power electronic applications the acceptable current density must be compared with the design orientated constructional parameter in terms of back side metallizations of the die, bump or ball interconnects and the Cu width and thickness of wiring solutions in the package and the surrounding area. Results will be presented to discuss the risk of EM and solutions to stabilize interfaces. The electromigration effects are also under investigation for extended power electronics applications under the influence of Cu trace dimensions, electrical and thermal interfaces, current density applied, higher operating temperatures and metallizations in the vertical layer stack of power modules.
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