用于引线框架封装SiC功率器件附件的压力辅助银烧结浆料

L. Wai, Kazunori Yamamoto, G. Tang, Jacob Jordon Soh
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引用次数: 0

摘要

研究了一种用于高性能碳化硅金属氧化物半导体场效应晶体管(SiC MOSFET)的新型助压阀的工艺。在本研究中,银烧结模具附着层可以获得较高的剪切强度。采用铜夹和锡锑(SnSb)焊料开发的栅极焊盘(焊盘尺寸= 0.8mm × 0.5mm)与源焊盘(焊盘尺寸= 1.04mm × 3.97mm)互连工艺通过了电源循环试验标准。压力辅助型银烧结浆料采用压力激光烧结工艺可获得高密度的银烧结层。
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Pressure-assist Silver Sintering Paste for SiC Power Device Attachment on Lead Frame Based Package
The process development of a novel pressure-assist pates for high performance silicon carbide metal-oxide semiconductor field-effect transistor (SiC MOSFET) was carried out. In this study, high shear strength on silver sintered die attach layer can be achieved. Interconnect process developed for gate pad (pad size = 0.8mm x 0.5mm) and source pad (pad size= 1.04mmx3.97mm) with copper clips and tin antimony (SnSb) solder passed the criteria of power cycling test. Highly densify silver sintered layer can be achieved by pressure-laser sintering process for pressure-assist type silver sintering paste.
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