{"title":"穿有共振式生化传感器的防水“μ潜水服”，用于溶液中在线检测","authors":"Haitao Yu, Ying Chen, P. Xu, F. Yu, Xinxin Li","doi":"10.1109/MEMSYS.2015.7051030","DOIUrl":null,"url":null,"abstract":"This paper reports a new method to ensure resonant micro-sensor long-time resonating in solution for real-time biochemical sensing/analysis. By designing a water-proof `diving-suit' for the cantilever resonator and an anti-leakage narrow `slit' to free the cantilever vibration, only the sensing-region of the cantilever contacts to analyte solution, while the other parts are remained in air to keep free-resonance. With this `μ-diving suit' design, the resonant cantilever with electrothermal driven and piezoresistive frequency readout integrated can achieve a Q factor of 17 in water. With specific sensing-material loaded at the sensing-region, the cantilever sensor experimentally realizes liquid-phase real-time detection to ppb-level organophosphorous pesticide of acephate.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Water-proof ‘μ-diving suit’ dressed on resonant biochemical sensor for online detection in solution\",\"authors\":\"Haitao Yu, Ying Chen, P. Xu, F. Yu, Xinxin Li\",\"doi\":\"10.1109/MEMSYS.2015.7051030\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports a new method to ensure resonant micro-sensor long-time resonating in solution for real-time biochemical sensing/analysis. By designing a water-proof `diving-suit' for the cantilever resonator and an anti-leakage narrow `slit' to free the cantilever vibration, only the sensing-region of the cantilever contacts to analyte solution, while the other parts are remained in air to keep free-resonance. With this `μ-diving suit' design, the resonant cantilever with electrothermal driven and piezoresistive frequency readout integrated can achieve a Q factor of 17 in water. With specific sensing-material loaded at the sensing-region, the cantilever sensor experimentally realizes liquid-phase real-time detection to ppb-level organophosphorous pesticide of acephate.\",\"PeriodicalId\":337894,\"journal\":{\"name\":\"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"51 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-03-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2015.7051030\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2015.7051030","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Water-proof ‘μ-diving suit’ dressed on resonant biochemical sensor for online detection in solution
This paper reports a new method to ensure resonant micro-sensor long-time resonating in solution for real-time biochemical sensing/analysis. By designing a water-proof `diving-suit' for the cantilever resonator and an anti-leakage narrow `slit' to free the cantilever vibration, only the sensing-region of the cantilever contacts to analyte solution, while the other parts are remained in air to keep free-resonance. With this `μ-diving suit' design, the resonant cantilever with electrothermal driven and piezoresistive frequency readout integrated can achieve a Q factor of 17 in water. With specific sensing-material loaded at the sensing-region, the cantilever sensor experimentally realizes liquid-phase real-time detection to ppb-level organophosphorous pesticide of acephate.
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