{"title":"石墨烯加速度计","authors":"A. Hurst, Sunwoo Lee, W. Cha, J. Hone","doi":"10.1109/MEMSYS.2015.7051096","DOIUrl":null,"url":null,"abstract":"This work presents an SU-8 clamped graphene nano-electro-mechanical-system (GNEMS) accelerometer. A suspended graphene membrane is circularly clamped by SU-8, with an additional proof mass made of either SU-8 or gold, located at the center of the membrane. This GNEMS accelerometer is approximately three orders of magnitude smaller than state of the art micro-electromechanical (MEMS) accelerometers with the diameter of the suspended graphene membrane being 3-10 μm and the proof mass diameter being 1-5 μm. Here, we present the fabrication, simulation, and experimental aperiodic calibration results of the GNEMS accelerometer, demonstrating a repeatable response to an input acceleration levels of ~1000-3000 g.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"17","resultStr":"{\"title\":\"A graphene accelerometer\",\"authors\":\"A. Hurst, Sunwoo Lee, W. Cha, J. Hone\",\"doi\":\"10.1109/MEMSYS.2015.7051096\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work presents an SU-8 clamped graphene nano-electro-mechanical-system (GNEMS) accelerometer. A suspended graphene membrane is circularly clamped by SU-8, with an additional proof mass made of either SU-8 or gold, located at the center of the membrane. This GNEMS accelerometer is approximately three orders of magnitude smaller than state of the art micro-electromechanical (MEMS) accelerometers with the diameter of the suspended graphene membrane being 3-10 μm and the proof mass diameter being 1-5 μm. Here, we present the fabrication, simulation, and experimental aperiodic calibration results of the GNEMS accelerometer, demonstrating a repeatable response to an input acceleration levels of ~1000-3000 g.\",\"PeriodicalId\":337894,\"journal\":{\"name\":\"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"26 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-03-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"17\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2015.7051096\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2015.7051096","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
This work presents an SU-8 clamped graphene nano-electro-mechanical-system (GNEMS) accelerometer. A suspended graphene membrane is circularly clamped by SU-8, with an additional proof mass made of either SU-8 or gold, located at the center of the membrane. This GNEMS accelerometer is approximately three orders of magnitude smaller than state of the art micro-electromechanical (MEMS) accelerometers with the diameter of the suspended graphene membrane being 3-10 μm and the proof mass diameter being 1-5 μm. Here, we present the fabrication, simulation, and experimental aperiodic calibration results of the GNEMS accelerometer, demonstrating a repeatable response to an input acceleration levels of ~1000-3000 g.
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