利用全息光刻技术制备高旋转对称性的二维和三维光子准晶体

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607878

C. Hsu, N. D. Lai, J. Lin

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引用次数: 1

摘要

我们演示了使用双曝光三光束和/或三光束加一干涉技术，可以轻松有效地制造2D和/或3D准周期结构。使用多面棱镜，我们的制造技术成为一种紧凑和坚固的方法来生产不同类型的结构，周期或准周期。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Fabrication of 2D and 3D photonic quasi-crystals with high rotation symmetry by holographic lithography technique

We demonstrate using a double-exposure three-beam and/or three-beam-plus-one interference technique, one can easily and efficiently fabricate 2D and/or 3D quasi-periodic structures. Using the multi-surface prism, our fabrication technique becomes a compact and robust way to produce different kinds of structures, periodic or quasi-periodic.

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2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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