掺银Cu纳米锡膏低温低压Cu-Cu键合

Junjie Li, T. Shi, Xing Yu, Chaoliang Cheng, Jinhu Fan, G. Liao, Zirong Tang
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引用次数: 0

摘要

本文提出了一种用掺银铜纳米锡膏进行Cu-Cu键合的新方法。采用高效的方法合成了铜纳米粒子,并将合成的铜纳米粒子与工业用银纳米粒子和有机溶液混合制备了纳米锡膏。对比了在250℃的键合温度下,掺银Cu纳米锡膏和纯Cu纳米锡膏的Cu-Cu键合剪切强度,最高剪切强度可达20.32 MPa,适合3D-IC封装行业。银掺杂铜纳米锡膏表现出的良好性能使其成为传统锡银铜钎料的理想替代品。
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Low temperature and low pressure Cu-Cu bonding with Ag doped Cu nanosolder paste
In this paper, a novel Cu-Cu bonding method with Ag doped Cu nanosolder paste is proposed. The Cu nanoparticles were synthesized with an efficient method, and the nanosolder paste was fabricated by mixing synthesized Cu nanoparticles, commercial used Ag nanoparticles and organic solution. The shear strengths of Cu-Cu bonding with Ag doped Cu nanosolder paste and pure Cu nanosolder paste at the bonding temperature of 250 °C have been compared, and the highest shear strength in this work could achieve 20.32 MPa, which is suitable for 3D-IC packaging industry. The good performance showed by Ag doped Cu nanosolder paste makes it become a promising substitute of traditional Sn-Ag-Cu solder.
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