金刚石肖特基势垒二极管TCAD仿真模型的探讨

N. Donato, M. Antoniou, E. Napoli, G. Amaratunga, F. Udrea
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引用次数: 9

摘要

本文对基于化学气相沉积(CVD)金刚石的肖特基势垒二极管(sbd)进行了数值分析。在软件中实现了适用于TCAD(技术计算机辅助设计)有限元模拟的材料和界面模型,并通过在室温和高温条件下以Al和Au作为肖特基金属触点的MIP+(金属本质层-高P掺杂衬底)sdd上获得的实验结果来评估其有效性。该论文还强调了改进这种TCAD模型的必要性,因为基于金刚石的器件的复杂行为在静态和动态条件下仍然不能很好地捕获。本文还讨论了氧表面界面对固态硬盘稳态性能的影响。
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On the models used for TCAD simulations of Diamond Schottky Barrier Diodes
In this paper we present a numerical analysis of Schottky Barrier Diodes (SBDs) based on CVD (Chemical Vapour Deposition) Diamond. Material and interface models suitable for TCAD (Technology Computer Aided Design) finite element simulations were implemented in the software and their validity was assessed against experimental results obtained on MIP+(Metal-Intrinsic layer-highly P doped substrate) SBDs with Al and Au as Schottky metal contacts both at room and higher temperature conditions. The paper also highlights the need to improve such TCAD models since the complex behavior of Diamond based devices is still not well captured in static and dynamic conditions. The present work also discusses the role of the Oxygen surface interface in the on state performances of the SBDs.
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