背面电镀镍膜驱动的两轴静磁驱动单晶硅微扫描仪

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607874

C. Hsu, Wen-Chien Chen, Tsung-Lin Tang, M. Yip, W. Fang

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引用次数: 2

摘要

提出了一种实现两轴微扫描镜的简单双掩模工艺。扫描镜由单晶硅材料制成，扫描仪背面镀镍以产生静磁驱动力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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The two-axis magnetostatic-drive single-crystal-Si micro scanner driven by back-side electroplating Ni film

A simple 2-mask process to realize a two-axis micro scanning mirror is presented. The scanning mirror is made of single-crystal-silicon, and Ni is electroplated at the backside of scanner to induce the magnetostatic driving force.

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2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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