{"title":"测量系统性能分析","authors":"R. Potter","doi":"10.1109/ASMC.1990.111235","DOIUrl":null,"url":null,"abstract":"A procedure for carrying out a measurement system capability study is presented. The tool is first calibrated against a known standard. Then, the tool's short-term repeatability is determined. A reproducibility evaluation is performed, stability is evaluated over time, and statistical process control is implemented. Key terminology in measurement capability studies is reviewed. Example formulas for a variance components analysis in the simple case where operators are the only source of variation are given.<<ETX>>","PeriodicalId":158760,"journal":{"name":"IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1990-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Measurement system capability analysis\",\"authors\":\"R. Potter\",\"doi\":\"10.1109/ASMC.1990.111235\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A procedure for carrying out a measurement system capability study is presented. The tool is first calibrated against a known standard. Then, the tool's short-term repeatability is determined. A reproducibility evaluation is performed, stability is evaluated over time, and statistical process control is implemented. Key terminology in measurement capability studies is reviewed. Example formulas for a variance components analysis in the simple case where operators are the only source of variation are given.<<ETX>>\",\"PeriodicalId\":158760,\"journal\":{\"name\":\"IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1990-09-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ASMC.1990.111235\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC.1990.111235","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A procedure for carrying out a measurement system capability study is presented. The tool is first calibrated against a known standard. Then, the tool's short-term repeatability is determined. A reproducibility evaluation is performed, stability is evaluated over time, and statistical process control is implemented. Key terminology in measurement capability studies is reviewed. Example formulas for a variance components analysis in the simple case where operators are the only source of variation are given.<>
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