在邻近的4H-SiC衬底上生长的薄gan涂层缺陷的发射

S. Xu, H. Wang, S. Cheung, Q. Li, X. Dai, M. Xie, S. Tong
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引用次数: 0

摘要

利用等离子体辅助分子束外延技术,研究了直接生长在0、3.5、5、8和21/spl度/错取向的4H-SiC(0001)上的纤钛矿GaN薄膜。在4H-SiC上制备的GaN薄膜的发射光谱中,有一个比3.47 eV的近带边发射峰低-70 meV的强发射峰,取向偏差分别为8和21/spl度。很明显,一种结构缺陷导致了峰值。叠加失配边界被认为是引起光跃迁的候选边界。结合薄膜的低温光致发光激发光谱,确定了结构缺陷引起的电子能级位置在氮化镓价带最大值以上约104 meV。
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Emission from defects in thin gan epilayers grown on vicinal 4H-SiC substrates
Wurtzite GaN epilayers directly grown on 4H-SiC (0001) misoriented by 0, 3.5, 5, 8, and 21/spl deg/ with plasma-assisted molecule beam epitaxy have been studied using variable-temperature photoluminescence. A strong emission peak locating at energy position -70 meV lower than the near band-edge emission peak at 3.47 eV is found in the emission spectra of the GaN films on 4H-SiC misoriented by 8 and 21/spl deg/. It is clear that one type of structural defect leads to the peak. Stacking mismatch boundaries are supposed to be the candidate causing the optical transition. Combined with the low-temperature photoluminescence excitation spectra of the films, the location of the electronic level induced by the structural defect is determined to be about 104 meV above the valence-band maximum of GaN.
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