用于印刷细、长导电浆料的拱形结构增强电镀钢板

Pi-Hsun Chen, Che-Hsin Lin
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引用次数: 1

摘要

本研究提出了一种以拱形结构和周围缓冲储层增强的mems模板,用于打印细线和长线导电浆料。所开发的增强模板成功地解决了传统模板结构存在的可打印线宽受限和易断裂等问题。采用两层AZ4620和一层SU-8作为电镀模具,研制了一种薄而坚固的电镀模板工艺。用该方法可以生产出具有长而高密度线条结构的精密模具。打印结果表明,所研制的模板能够打印出间距为20 μm的平行线。采用拱形结构增强模板可打印细平行线长度大于10mm。此外,所开发的模板能够印刷小间距的闭合环图案,这是使用传统的模板或丝网印刷技术无法印刷的。本研究开发的基于mems的模板将对粘贴印刷技术产生重大影响。
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Electroplated stencil reinforced with arch structures for printing fine and long conductive paste
This study presents an MEMS-based stencil reinforced with arch structures and a surrounding buffer reservoir for printing conductive paste of fine and long lines. The developed reinforced stencil successfully solves the problems came with the conventional stencil structure including limited printable line width and ease of fracture. A novel process was developed to fabricate a thin yet robust electroplated stencil by using two AZ4620 layers and one SU-8 layer as the electroplating molds. A precise stencil with a long and high-density line structure can be produced with the developed method. The printing results show that the developed stencil is capable of printing parallel lines of 20 μm in pitch. The printable length of the fine parallel lines is longer than 10 mm with the arch structure reinforced stencil. In addition, the developed stencil is capable of printing closed ring patterns with small pitch, which is not possible to be printed using conventional stencil or screen printing technologies. The MEMS-based stencil developed in the present study will give substantial impact on the paste printing technologies.
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