利用纳米CuInSe2自旋包覆法制备CuInSe2薄膜及其表征

Takahiro Suzuki, S. Ando
{"title":"利用纳米CuInSe2自旋包覆法制备CuInSe2薄膜及其表征","authors":"Takahiro Suzuki, S. Ando","doi":"10.1109/SMICND.2015.7355167","DOIUrl":null,"url":null,"abstract":"CuInSe2 (CIS) thin films prepared on quartz substrates by the spin-coating method using the nanoparticles of CIS have been investigated by X-ray diffraction, scanning electron microscope, energy dispersive X-ray analysis. The chemical composition of CIS thin films sintered in N2 atmosphere was Se/metal(Cu+In) = 0.55 or 0.58, indicating a deficiency of selenium. However, CIS thin films sintered in atmosphere of N2 including Se vapor were improved Se/metal molar ratio. It can be seen that the improvement of crystallinity of CIS thin films using the nanoparticles of CIS were relatively effective for the sintering time and the sintering Se vapor.","PeriodicalId":325576,"journal":{"name":"2015 International Semiconductor Conference (CAS)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Preparation and characterizations of CuInSe2 thin films by spin-coating method using the nanoparticles of CuInSe2\",\"authors\":\"Takahiro Suzuki, S. Ando\",\"doi\":\"10.1109/SMICND.2015.7355167\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"CuInSe2 (CIS) thin films prepared on quartz substrates by the spin-coating method using the nanoparticles of CIS have been investigated by X-ray diffraction, scanning electron microscope, energy dispersive X-ray analysis. The chemical composition of CIS thin films sintered in N2 atmosphere was Se/metal(Cu+In) = 0.55 or 0.58, indicating a deficiency of selenium. However, CIS thin films sintered in atmosphere of N2 including Se vapor were improved Se/metal molar ratio. It can be seen that the improvement of crystallinity of CIS thin films using the nanoparticles of CIS were relatively effective for the sintering time and the sintering Se vapor.\",\"PeriodicalId\":325576,\"journal\":{\"name\":\"2015 International Semiconductor Conference (CAS)\",\"volume\":\"22 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-12-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 International Semiconductor Conference (CAS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.2015.7355167\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 International Semiconductor Conference (CAS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2015.7355167","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

采用x射线衍射、扫描电镜、x射线能谱分析等方法,研究了用CIS纳米粒子自旋涂覆法制备的CuInSe2 (CIS)薄膜。在N2气氛下烧结的CIS薄膜的化学成分为Se/metal(Cu+ in) = 0.55或0.58,表明其缺硒。而在含Se气相的N2气氛中烧结的CIS薄膜则提高了Se/金属摩尔比。可以看出,CIS纳米粒子对CIS薄膜结晶度的改善对于烧结时间和烧结硒气相都是相对有效的。
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Preparation and characterizations of CuInSe2 thin films by spin-coating method using the nanoparticles of CuInSe2
CuInSe2 (CIS) thin films prepared on quartz substrates by the spin-coating method using the nanoparticles of CIS have been investigated by X-ray diffraction, scanning electron microscope, energy dispersive X-ray analysis. The chemical composition of CIS thin films sintered in N2 atmosphere was Se/metal(Cu+In) = 0.55 or 0.58, indicating a deficiency of selenium. However, CIS thin films sintered in atmosphere of N2 including Se vapor were improved Se/metal molar ratio. It can be seen that the improvement of crystallinity of CIS thin films using the nanoparticles of CIS were relatively effective for the sintering time and the sintering Se vapor.
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