带隙工程离子束技术制备纳米结构Ge1-xSnx合金

G. Bhowmik, Mengbing Huang
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摘要

硅光子学是一项颠覆性技术,通过利用光进行数据传输,有望彻底改变高性能计算。由于硅的低效率发射,一个突出的任务是开发非平衡族四纳米级合金,以实现新的功能,如形成直接带隙元素半导体。为了解决这一挑战,我们建议使用离子束工艺在Ge晶圆中制造Ge1−xSnx合金纳米线,作为构建硅兼容光源的潜在材料结构。利用卢瑟福后向散射技术(RBS)对Sn离子注入锗晶体进行了初步研究,并利用扫描电子显微镜(SEM)和能量色散x射线光谱(EDX)对锗晶体的Sn分布进行了研究,利用拉曼光谱对Sn的结晶度和取代性进行了研究。这种Sn在Ge中的非平衡感应,一种自下而上形成直接带隙Ge1−xSnx纳米线的方法,为IV族光子学开辟了无限的可能性。
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Development of nanostructured Ge1-xSnx alloy using ion beam techniques for band gap engineering
Silicon Photonics is a disruptive technology that promises to revolutionize high performance computing by taking advantage of light in data transmission. Due to inefficient emission from Si, an outstanding quest has been the development of non-equilibrium group IV nanoscale alloy in achieving new functionalities, such as the formation of a direct bandgap elemental semiconductor. To address this challenge, we propose to use ion beam processing to fabricate Ge1−xSnx alloy nanowires in Ge wafers as a potential material structure for building Si-compatible light sources. Preliminary investigations of ion implantation of Sn into Ge crystals using Rutherford backscattering technique (RBS), their structural properties examined through scanning electron microscopy (SEM) and Sn distribution using energy-dispersive X-ray spectroscopy (EDX), crystallinity and Sn substitutionality using Raman spectroscopy is presented. This non-equilibrium induction of Sn in Ge, a bottom-up approach to formation of direct bandgap Ge1−xSnx nanowires opens up unlimited possibilities in group IV photonics.
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